FILM FORMING DEVICE, AND PRODUCTION METHOD FOR OPTICAL MEMBER

Details for Australian Patent Application No. 2002354177 (hide)

Owner NIKON CORPORATION

Inventors AKIYAMA, Takayuki

Pub. Number AU-A-2002354177

PCT Number PCT/JP02/13168

PCT Pub. Number WO2003/052468

Priority 2002-319149 31.10.02 JP; 2001-385613 19.12.01 JP

Filing date 17 December 2002

Wipo publication date 30 June 2003

International Classifications

G02B 005/28 Optical elements other than lenses - Interference filters

C23C 014/54 Coating by vacuum evaporation, by sputtering or by ion implantation - Controlling or regulating the coating process

G01B 011/06 Measuring arrangements characterised by the use of optical means - for measuring thickness

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 2002-319149 31.10.02 JP; 2001-385613 19.12.01 JP

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002354177

16 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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