SYSTEM AND METHOD FOR DEPTH PROFILING AND CHARACTERIZATION OF THIN FILMS

Details for Australian Patent Application No. 2002353876 (hide)

Owner PHYSICAL ELECTRONICS, INC.

Inventors WATSON, David, G.; LARSON, Paul, E.; MOULDER, John, E.; PERLOFF, David, S.

Pub. Number AU-A-2002353876

PCT Number PCT/US02/34137

PCT Pub. Number WO2003/038417

Priority 10/075,571 26.10.01 US; 10/003,224 26.10.01 US

Filing date 24 October 2002

Wipo publication date 12 May 2003

International Classifications

G01N 023/00 Investigating or analysing materials by the use of wave or particle radiation not covered by group or , e.g. X-rays, neutrons

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 10/075,571 26.10.01 US; 10/003,224 26.10.01 US

10 July 2003 Application Open to Public Inspection

  Published as AU-A-2002353876

15 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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