METHOD AND APPARATUS FOR ENDPOINT DETECTION DURING CHEMICAL MECHANICAL POLISHING

Details for Australian Patent Application No. 2002348184 (hide)

Owner SPEEDFAM-IPEC CORPORATION

Inventors PARIKH, Prabodh, J.

Pub. Number AU-A-2002348184

PCT Number PCT/US02/35649

PCT Pub. Number WO2003/041909

Priority 10/035,519 09.11.01 US

Filing date 6 November 2002

Wipo publication date 26 May 2003

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24B 049/12 Measuring - involving optical means

B24D 007/12 Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 10/035,519 09.11.01 US

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002348184

29 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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