METHOD AND APPARATUS FOR CONTROLLING SLURRY DISTRIBUTION

Details for Australian Patent Application No. 2002348183 (hide)

Owner SPEEDFAM-IPEC CORPORATION

Inventors ZHANG, Guangying; LAURSEN, Thomas

Pub. Number AU-A-2002348183

PCT Number PCT/US02/35632

PCT Pub. Number WO2003/043783

Priority 09/999,401 15.11.01 US

Filing date 6 November 2002

Wipo publication date 10 June 2003

International Classifications

B24B 057/02 Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24D 013/14 Wheels having flexibly-acting working parts, e.g. buffing wheels

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 09/999,401 15.11.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002348183

29 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002348184-METHOD AND APPARATUS FOR ENDPOINT DETECTION DURING CHEMICAL MECHANICAL POLISHING

2002348182-PIPE COUPLING SYSTEM HAVING AN ANTI-REVERSING LOCKING RING