CHEMICAL MECHANICAL POLISHING ENDPOINT DETECTION

Details for Australian Patent Application No. 2002347876 (hide)

Owner NUTOOL, INC.

Inventors BASOL, Bulent, M.; TALIEH, Homayoun

Pub. Number AU-A-2002347876

PCT Number PCT/US02/32577

PCT Pub. Number WO2003/031119

Priority 09/976,469 12.10.01 US

Filing date 11 October 2002

Wipo publication date 22 April 2003

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24B 049/12 Measuring - involving optical means

B24B 057/02 Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 09/976,469 12.10.01 US

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002347876

1 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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