ELECTROSTATICALLY ACTUATED MICRO-ELECTRO-MECHANICAL DEVICES AND METHOD OF MANUFACTURE
Details for Australian Patent Application No. 2002338254 (hide)
International Classifications
Event Publications
20 February 2003 Complete Application Filed
Priority application(s): 60/276,814 16.03.01 US
3 April 2003 Application Open to Public Inspection
Published as AU-A-2002338254
12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired
This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.
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2002338253-ELECTROSTATICALLY ACTUATED MICRO-ELECTRO-MECHANICAL DEVICES AND METHOD OF MANUFACTURE
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