ELECTROSTATICALLY ACTUATED MICRO-ELECTRO-MECHANICAL DEVICES AND METHOD OF MANUFACTURE

Details for Australian Patent Application No. 2002338253 (hide)

Owner CORNING INTELLISENSE CORPORATION

Inventors ANDOSCA, Robert, G.

Pub. Number AU-A-2002338253

PCT Number PCT/US02/07669

PCT Pub. Number WO2002/080255

Priority 60/276,319 16.03.01 US

Filing date 15 March 2002

Wipo publication date 15 October 2002

International Classifications

H01L 021/311 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 60/276,319 16.03.01 US

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002338253

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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