PRODUCTION METHOD AND PRODUCTION DEVICE FOR SEMICONDUCTOR DEVICE

Details for Australian Patent Application No. 2002338013 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors MURAKAWA, Shigemi; SATO, Shinichi; NAKANISHI, Toshio

Pub. Number AU-A-2002338013

PCT Number PCT/JP02/08736

PCT Pub. Number WO2003/019636

Priority 2001-260180 29.08.01 JP

Filing date 29 August 2002

Wipo publication date 10 March 2003

International Classifications

H01L 021/265 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 2001-260180 29.08.01 JP

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002338013

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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