OPTICAL SYSTEM, PROJECTION OPTICAL SYSTEM, EXPOSURE DEVICE HAVING THE PROJECTION OPTICAL SYSTEM, AND METHOD FOR MANUFACTURING MICRO DEVICE USING THE EXPOSURE DEVICE

Details for Australian Patent Application No. 2002338012 (hide)

Owner NIKON CORPORATION

Inventors OMURA, Yasuhiro

Pub. Number AU-A-2002338012

PCT Number PCT/JP02/08726

PCT Pub. Number WO2003/023481

Priority 2001-272648 07.09.01 JP

Filing date 29 August 2002

Wipo publication date 24 March 2003

International Classifications

G02B 013/24 Optical objectives specially designed for the purposes specified below - for reproducing or copying at short object distances

G02B 027/28 Other optical systems - for polarising

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G03F 007/22 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposing sequentially with the same light pattern different positions of the same surface

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 2001-272648 07.09.01 JP

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002338012

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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