METHOD AND APPARATUS FOR WALL FILM MONITORING

Details for Australian Patent Application No. 2002334819 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors PARSONS, Richard; STRANG, Eric, J.

Pub. Number AU-A-2002334819

PCT Number PCT/US02/31602

PCT Pub. Number WO2003/036224

Priority 60/330,518 24.10.01 US; 60/330,555 24.10.01 US

Filing date 24 October 2002

Wipo publication date 6 May 2003

International Classifications

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

13 February 2003 Complete Application Filed

  Priority application(s): 60/330,518 24.10.01 US; 60/330,555 24.10.01 US

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002334819

8 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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