System for filling substrate chambers with liquid

Details for Australian Patent Application No. 2002334818 (hide)

International Classifications

Event Publications

13 February 2003 Complete Application Filed

Priority application(s): 09/977,225 16.10.01 US

3 July 2003 Application Open to Public Inspection

Published as AU-A-2002334818

15 February 2007 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(e). Examination has been requested or an examination report has issued for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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