METHOD OF FORMING NITRIDE FILMS

Details for Australian Patent Application No. 2002326027 (hide)

Owner TRIKON HOLDINGS LIMITED

Inventors PATEL, Jashu; BEEKMAN, Knut

Pub. Number AU-A-2002326027

PCT Number PCT/GB02/04151

PCT Pub. Number WO2003/025249

Priority 0122333.8 15.09.01 GB

Filing date 12 September 2002

Wipo publication date 1 April 2003

International Classifications

C23C 016/34 Chemical deposition or plating by decomposition - Nitrides

Event Publications

23 January 2003 Complete Application Filed

  Priority application(s): 0122333.8 15.09.01 GB

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002326027

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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