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Details for Australian Patent Application No. 2002321104 (hide)

Owner INTERNATIONAL BUSINESS MACHINES

Inventors COOLBAUGH, Douglas, D.; SCHONENBERG, Kathryn, T.

Pub. Number AU-A-2002321104

PCT Number PCT/EP02/06923

PCT Pub. Number WO2002/101810

Priority 09/878/605 11.06.01 US

Filing date 4 June 2002

Wipo publication date 23 December 2002

International Classifications

H01L 021/331 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/265 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/878/605 11.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002321104

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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