SHOWERHEAD ELECTRODE DESIGN FOR SEMICONDUCTOR PROCESSING REACTOR

Details for Australian Patent Application No. 2002318913 (hide)

Owner LAM RESEARCH CORPORATION

Inventors DHINDSA, Rajinder; LENZ, Eric

Pub. Number AU-A-2002318913

PCT Number PCT/US02/24057

PCT Pub. Number WO2003/015133

Priority 60/311,048 08.08.01 US; 10/020,413 18.12.01 US

Filing date 31 July 2002

Wipo publication date 24 February 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 60/311,048 08.08.01 US; 10/020,413 18.12.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002318913

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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