APPARATUS, PROCESS AND METHOD FOR MOUNTING AND TREATING A SUBSTRATE

Details for Australian Patent Application No. 2002318912 (hide)

Owner DEFLEX LLC JACKSON, David, P.

Inventors JACKSON, David, P.

Pub. Number AU-A-2002318912

PCT Number PCT/US02/24040

PCT Pub. Number WO2003/003428

Priority 60/251,848 08.12.00 US

Filing date 7 December 2001

Wipo publication date 3 March 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 60/251,848 08.12.00 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002318912

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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