INTERFEROMETER SYSTEM

Details for Australian Patent Application No. 2002318347 (hide)

Owner NIKON CORPORATION

Inventors INOUE, Fuyuhiko

Pub. Number AU-A-2002318347

PCT Number PCT/US02/18983

PCT Pub. Number WO2002/103285

Priority 09/883,296 19.06.01 US; 09/934,081 22.08.01 US

Filing date 18 June 2002

Wipo publication date 2 January 2003

International Classifications

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 09/883,296 19.06.01 US; 09/934,081 22.08.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002318347

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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