TUNING CONTROL PARAMETERS FOR VIBRATION REDUCTION AND MOTION CONTROL

Details for Australian Patent Application No. 2002318346 (hide)

Owner CYMER, INC.

Inventors JACQUES, Robert, N.

Pub. Number AU-A-2002318346

PCT Number PCT/US02/18929

PCT Pub. Number WO2003/003132

Priority 09/896,689 29.06.01 US

Filing date 12 June 2002

Wipo publication date 3 March 2003

International Classifications

G05B 013/02 Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion - electric

Event Publications

9 January 2003 Complete Application Filed

  Priority application(s): 09/896,689 29.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002318346

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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