METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE AND SEMICONDUCTOR SUBSTRATE

Details for Australian Patent Application No. 2002313269 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors YUASA, Mitsuhiro

Pub. Number AU-A-2002313269

PCT Number PCT/JP02/06437

PCT Pub. Number WO2003/007382

Priority 2001-207870 09.07.01 JP

Filing date 26 June 2002

Wipo publication date 29 January 2003

International Classifications

H01L 027/12 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - the substrate being other than a semiconductor body, e.g. an insulating body

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 2001-207870 09.07.01 JP

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002313269

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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