CHAMBER SENSOR PORT, CHAMBER, AND ELECTRON BEAM PROCESSOR

Details for Australian Patent Application No. 2002313262 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors HAYASHI, Daisuke

Pub. Number AU-A-2002313262

PCT Number PCT/JP02/06346

PCT Pub. Number WO2003/003433

Priority 2001-195792 28.06.01 JP

Filing date 25 June 2002

Wipo publication date 3 March 2003

International Classifications

H01L 021/263 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 2001-195792 28.06.01 JP

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002313262

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002313263-LOGIC VERIFYING SYSTEM, LOGIC VERIFYING METHOD, COMPUTER PROGRAM, AND RECORDING MEDIUM

2002313261-PAINTING FACILITY MANAGEMENT SYSTEM