XE PREAMORPHIZING IMPLANTATION

Details for Australian Patent Application No. 2002309547 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors BUYNOSKI, Matthew, Stephen; NG, Che-Hoo

Pub. Number AU-A-2002309547

PCT Number PCT/US02/10827

PCT Pub. Number WO2003/012844

Priority 09/918,794 01.08.01 US

Filing date 5 April 2002

Wipo publication date 17 February 2003

International Classifications

H01L 021/265 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/918,794 01.08.01 US

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002309547

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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