MASK AND PRODUCTION METHOD THEREFOR, OPTICAL ELEMENT AND PRODUCTION METHOD THEREFOR, AND ILLUMINATING OPTICDAL DEVICE PROVIDED WITH THE OPTICAL ELEMENT AND EXPOSURE SYSTEM

Details for Australian Patent Application No. 2002308941 (hide)

Owner NIKON CORPORATION

Inventors GOTO, Akihiro

Pub. Number AU-A-2002308941

PCT Number PCT/JP02/04622

PCT Pub. Number WO2002/093260

Priority 2001-141329 11.05.01 JP

Filing date 13 May 2002

Wipo publication date 25 November 2002

International Classifications

G03F 001/08 Preparation of originals for the photomechanical production of textured or patterned surfaces - Originals having inorganic imaging layers, e.g. chrome masks

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 2001-141329 11.05.01 JP

1 May 2003 Application Open to Public Inspection

  Published as AU-A-2002308941

4 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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