Silicon oxide membrane

Details for Australian Patent Application No. 2002308940 (hide)

Owner Toyo Seikan Kaisha, Ltd

Inventors Ieki, Toshihide; Kobayashi, Akira; Inagaki, Hajime; Tanikawa, Miwako; Namiki, Tsunehisa; Kurashima, Hideo; Yamada, Koji

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-B-2002308940

PCT Number PCT/JP02/04616

PCT Pub. Number WO2002/092875

Priority 2002-131424 07.05.02 JP; 2001-142405 11.05.01 JP; 2002-42034 19.02.02 JP

Filing date 13 May 2002

Wipo publication date 25 November 2002

Acceptance publication date 8 February 2007

International Classifications

C23C 16/40 (2006.01) Chemical deposition or plating by decomposition - Oxides

C23C 16/02 (2006.01) Chemical deposition or plating by decomposition - Pretreatment of the material to be coated

C23C 16/04 (2006.01) Chemical deposition or plating by decomposition - Coating on selected surface areas, e.g. using masks

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 2002-131424 07.05.02 JP; 2001-142405 11.05.01 JP; 2002-42034 19.02.02 JP

1 May 2003 Application Open to Public Inspection

  Published as AU-B-2002308940

8 February 2007 Application Accepted

  Published as AU-B-2002308940

7 June 2007 Standard Patent Sealed

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