METHOD AND APPARATUS FOR AVOIDING PARTICLE ACCUMULATION IN ELECTRODEPOSITION

Details for Australian Patent Application No. 2002306973 (hide)

Owner NUTOOL, INC.

Inventors BASOL, Bulent, M.; UZOH, Cyprian; TALIEH, Homayoun

Pub. Number AU-A-2002306973

PCT Number PCT/US02/09794

PCT Pub. Number WO2002/078903

Priority 09/982,558 17.10.01 US; 60/280,524 30.03.01 US

Filing date 26 March 2002

Wipo publication date 15 October 2002

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

C25D 005/06 Electroplating characterised by the process

B24B 053/007 Devices or means for dressing or conditioning abrasive surfaces - Cleaning of grinding wheels

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C25B 009/00 Cells or assemblies of cells

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/982,558 17.10.01 US; 60/280,524 30.03.01 US

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002306973

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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