METHOD FOR CONTROLLING PARAMETER USING A PROCESS OF SEMICONDUCTOR PRODUCTION

Details for Australian Patent Application No. 2002235001 (hide)

Owner JIWOO TECHNIQUES KOREA

Inventors LEE, Man-Bong

Pub. Number AU-A-2002235001

PCT Pub. Number WO2002/082529

Priority 2001/18474 07.04.01 KR

Filing date 22 February 2002

Wipo publication date 21 October 2002

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

10 April 2003 Application Open to Public Inspection

  Published as AU-A-2002235001

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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