DEVICE FOR DETECTING WAFER POSITIONING FAILURE ON SEMICONDUCTOR PROCESSING DEVICE AND METHOD THEREOF

Details for Australian Patent Application No. 2002235000 (hide)

Owner JIWOO TECHNIQUES KOREA

Inventors LEE, Man-Bong

Pub. Number AU-A-2002235000

PCT Pub. Number WO2002/069393

Priority 2001/9515 24.02.01 KR

Filing date 22 February 2002

Wipo publication date 12 September 2002

International Classifications

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 March 2003 Application Open to Public Inspection

  Published as AU-A-2002235000

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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