METHOD FOR ETCHING ORGANIC INSULATING FILM AND DUAL DAMASENE PROCESS

Details for Australian Patent Application No. 2002234907 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors INAZAWA, Koichiro; IGARASHI, Yoshiki; SUEMASA, Tomoki

Pub. Number AU-A-2002234907

PCT Pub. Number WO2002/073674

Priority 2001-65459 08.03.01 JP

Filing date 27 February 2002

Wipo publication date 24 September 2002

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Application Open to Public Inspection

  Published as AU-A-2002234907

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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