FLUID TREATMENT SYSTEM

Details for Australian Patent Application No. 2002234906 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors OKASE, Wataru; YAMAUCHI, Jun; MATSUO, Takenobu

Pub. Number AU-A-2002234906

PCT Pub. Number WO2002/070791

Priority 2001-60320 05.03.01 JP

Filing date 27 February 2002

Wipo publication date 19 September 2002

International Classifications

C25D 017/00 Constructional parts, or assemblies thereof, of cells for electrolytic coating

Event Publications

13 March 2003 Application Open to Public Inspection

  Published as AU-A-2002234906

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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