EXHAUST HEAT UTILIZATION SYSTEM, EXHAUST HEAT UTILIZATION METHOD AND SEMICONDUCTOR PRODUCTION FACILITY

Details for Australian Patent Application No. 2002232225 (hide)

Owner TOKYO ELECTRON LIMITED TAISEI CORPORATION

Inventors MORI, Naoki; SUENAGA, Osamu; KOBAYASHI, Sadao; ITO, Hiromu

Pub. Number AU-A-2002232225

PCT Pub. Number WO2002/067301

Priority 2001-44216 20.02.01 JP

Filing date 18 February 2002

Wipo publication date 4 September 2002

International Classifications

F25D 001/02 Devices not associated with refrigerating machinery

F25B 027/02 Machines, plant, or systems, using particular sources of energy - using waste heat, e.g. from internal-combustion engines

F24H 001/12 Water heaters having heat generating means, e.g. boiler, flow-heater, water-storage heater - in which the water is kept separate from the heating medium

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

Event Publications

27 February 2003 Application Open to Public Inspection

  Published as AU-A-2002232225

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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