METHOD AND DEVICE FOR DETECTING POSITION, METHOD AND DEVICE FOR EXPOSURE, AND PROGRAM AND INFORMATION RECORDING MEDIUM

Details for Australian Patent Application No. 2002228396 (hide)

Owner NIKON CORPORATION

Inventors SUGIHARA, Tarou; YOSHIDA, Kouji

Pub. Number AU-A-2002228396

PCT Pub. Number WO2002/061367

Priority 2001-22814 31.01.01 JP

Filing date 31 January 2002

Wipo publication date 12 August 2002

International Classifications

G01B 011/00 Measuring arrangements characterised by the use of optical means

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002228396

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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