FERROELECTRIC THIN FILM, METAL THIN FILM OR OXIDE THIN FILM, AND METHOD AND APPARATUS FOR PREPARATION THEREOF, AND ELECTRIC OR ELECTRONIC DEVICE USING SAID THIN FILM

Details for Australian Patent Application No. 2002225424 (hide)

Owner KABUSHIKI KAISHA WATANABE SHOKO TODA, Masayuki

Inventors FUKAGAWA, Mitsuru; KUSUHARA, Masaki; YAMOTO, Hisayoshi; TODA, Masayuki; UMEDA, Masaru

Pub. Number AU-A-2002225424

PCT Pub. Number WO2002/058129

Priority 2001-011070 19.01.01 JP; 2001-392833 18.11.01 JP; 2001-049436 19.01.01 JP; 2001-010827 18.01.01 JP

Filing date 18 January 2002

Wipo publication date 30 July 2002

International Classifications

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/31 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002225424

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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