PLASMA DEVICE AND PLASMA GENERATING METHOD

Details for Australian Patent Application No. 2002225423 (hide)

Owner TOKYO ELECTRON LIMITED ANDO, Makoto

Inventors ISHII, Nobuo; ANDO, Makoto

Pub. Number AU-A-2002225423

PCT Pub. Number WO2002/058124

Priority 2001-10873 18.01.01 JP

Filing date 18 January 2002

Wipo publication date 30 July 2002

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002225423

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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