Method of material analysis by means of a focused electron beam using characteristic X-rays and back-scattered electrons and the equipment to perform it

Details for Australian Patent Application No. 2012201146 (hide)

Owner TESCAN, a.s.

Inventors Motl, David; Filip, Vojtech

Agent Cullens

Pub. Number AU-A-2012201146

Priority CZ2011-154 23.03.11 CZ

Filing date 27 February 2012

Wipo publication date 11 October 2012

International Classifications

G01N 23/225 Investigating or analysing materials by the use of wave or particle radiation not covered by group or , e.g. X-rays, neutrons

G01N 23/203 Investigating or analysing materials by the use of wave or particle radiation not covered by group or , e.g. X-rays, neutrons

Event Publications

15 March 2012 Complete Application Filed

  Priority application(s): CZ2011-154 23.03.11 CZ

11 October 2012 Application Open to Public Inspection

  Published as AU-A-2012201146

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