Methods of arc detection and suppression during RF sputtering of a thin film on a substrate
Details for Australian Patent Application No. 2011202984 (hide)
International Classifications
Event Publications
7 July 2011 Complete Application Filed
Priority application(s): 12/827,029 30.06.10 US
19 January 2012 Application Open to Public Inspection
Published as AU-A-2011202984
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