Apparatus and methods of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device

Details for Australian Patent Application No. 2011202979 (hide)

Owner PrimeStar Solar, Inc.

Inventors Feldman-Peadbody, Scott Daniel; Black, Russell Weldon

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-A-2011202979

Priority 12/829,544 02.07.10 US

Filing date 21 June 2011

Wipo publication date 19 January 2012

International Classifications

C23C 14/58 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - After-treatment

C23C 14/18 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - on other inorganic substrates

H01L 21/203 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

7 July 2011 Complete Application Filed

  Priority application(s): 12/829,544 02.07.10 US

19 January 2012 Application Open to Public Inspection

  Published as AU-A-2011202979

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