Vapor deposition apparatus and process for continuous indirect deposition of a thin film layer on a substrate

Details for Australian Patent Application No. 2011201782 (hide)

Owner PrimeStar Solar, Inc.

Inventors Black, Russell Weldon

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-A-2011201782

Priority 12/770,027 29.04.10 US

Filing date 19 April 2011

Wipo publication date 17 November 2011

International Classifications

H01L 21/203 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 14/00 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation

Event Publications

12 May 2011 Complete Application Filed

  Priority application(s): 12/770,027 29.04.10 US

17 November 2011 Application Open to Public Inspection

  Published as AU-A-2011201782

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