Seal configuration for a system for continuous deposition of a thin film layer on a substrate
Details for Australian Patent Application No. 2011201680 (hide)
International Classifications
Event Publications
28 April 2011 Complete Application Filed
Priority application(s): 12/765,316 22.04.10 US
10 November 2011 Application Open to Public Inspection
Published as AU-A-2011201680
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