Owner PrimeStar Solar, Inc.

Inventors Feldman-Peabody, Scott Daniel; Drayton, Jennifer Ann

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-A-2011201198

Priority 12/750,096 30.03.10 US

Filing date 17 March 2011

Wipo publication date 20 October 2011

C23C 14/34 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

H01L 31/0216 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - Coatings

H01L 31/042 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - including a panel or array of photoelectric cells, e.g. solar cells

H01L 31/18 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof