Method for spatially determining the series resistance of a semiconductor structure

Details for Australian Patent Application No. 2010251436 (hide)

Owner Albert-Ludwigs-Universitat Freiburg Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.

Inventors Haunschild, Jonas; Glatthaar, Markus; Rein, Stefan

Agent Spruson & Ferguson

Pub. Number AU-A-2010251436

PCT Pub. Number WO2010/133325

Priority 10 2009 021 799.1 18.05.09 DE

Filing date 17 May 2010

Wipo publication date 25 November 2010

International Classifications

G01R 31/26 (2006.01) Arrangements for testing electric properties - Testing of individual semiconductor devices

G01N 21/64 (2006.01) Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Fluorescence

Event Publications

19 January 2012 PCT application entered the National Phase

  PCT publication WO2010/133325 Priority application(s): WO2010/133325

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