Owner Newport Corporation

Inventors Ciocan, Razvan; Donohue, John; Feldman, Arkady; Li, Zhuoyun

Agent Spruson & Ferguson

Pub. Number AU-A-2010249578

PCT Pub. Number WO2010/135453

Priority 61/216,704 19.05.09 US

Filing date 19 May 2010

Wipo publication date 25 November 2010

H01L 21/66 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

H01L 31/042 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - including a panel or array of photoelectric cells, e.g. solar cells

H01L 31/18 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof