Owner PrimeStar Solar, Inc.

Inventors Rathweg, Christopher; Reed, Max William; Pavol, Mark Jeffrey

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-A-2010249142

Priority 12/639,043 16.12.09 US

Filing date 2 December 2010

Wipo publication date 30 June 2011

C23C 16/00 (2006.01) Chemical deposition or plating by decomposition

C23C 14/24 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Vacuum evaporation

C23C 16/04 (2006.01) Chemical deposition or plating by decomposition - Coating on selected surface areas, e.g. using masks

C23C 16/44 (2006.01) Chemical deposition or plating by decomposition - characterised by the method of coating

C23C 16/52 (2006.01) Chemical deposition or plating by decomposition - Controlling or regulating the coating process

H01L 31/18 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof