Modular system and process for continuous deposition of a thin film layer on a substrate
Details for Australian Patent Application No. 2010249140 (hide)
International Classifications
Event Publications
16 December 2010 Complete Application Filed
Priority application(s): 12/638,653 15.12.09 US
30 June 2011 Application Open to Public Inspection
Published as AU-A-2010249140
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