Method and system for depositing multiple materials on a substrate

Details for Australian Patent Application No. 2010235906 (hide)

Owner General Electric Company

Inventors Korevaar, Bastiaan Arie; Ahmad, Faisal Razi; DeLuca, John Anthony; Johnson, James Neil; Lemmon, John Patrick; Xi, Yangang Andrew

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-A-2010235906

Priority 12/608,455 29.10.09 US

Filing date 19 October 2010

Wipo publication date 19 May 2011

International Classifications

C23C 16/00 (2006.01) Chemical deposition or plating by decomposition

H01L 21/363 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 31/18 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

Event Publications

4 November 2010 Complete Application Filed

  Priority application(s): 12/608,455 29.10.09 US

19 May 2011 Application Open to Public Inspection

  Published as AU-A-2010235906

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