Multipurpose acidic, organic solvent based microelectronic cleaning composition

Details for Australian Patent Application No. 2010218426 (hide)

Owner Avantor Performance Materials, Inc.

Inventors Hsu, Chien-Pin S.; Westwood, Glenn; Gemmill, William R.

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-A-2010218426

PCT Pub. Number WO2010/098899

Priority 61/155,309 25.02.09 US

Filing date 14 January 2010

Wipo publication date 2 September 2010

International Classifications

G03F 7/42 (2006.01) Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Stripping or agents therefor

Event Publications

20 October 2011 PCT application entered the National Phase

  PCT publication WO2010/098899 Priority application(s): WO2010/098899

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