Owner NewSouth Innovations Pty Limited

Inventors Mai, Ly; Edwards, Matthew B.; Green, Martin A.; Hallam, Bret; Hameiri, Ziv; Kuepper, Nicole B.; Sugianto, Adeline; Tjahjono, Budi S.; Wang, Stanley; Wenham, Alison M.; Wenham, Stuart R.

Agent FB Rice

Pub. Number AU-A-2010205903

PCT Pub. Number WO2010/081198

Priority 2009900171 16.01.09 AU; 2009900187 16.01.09 AU

Filing date 15 January 2010

Wipo publication date 22 July 2010

H01L 21/225 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/18 (1970.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/24 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 29/00 (2006.01) Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

H01L 31/068 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation