Film forming apparatus

Details for Australian Patent Application No. 2009292608 (hide)

Owner NGK INSULATORS, LTD.

Inventors Saito, Takao; Terazawa, Tatsuya

Agent Patent Attorney Services

Pub. Number AU-B-2009292608

Priority 2008-247728 26.09.08 JP

Filing date 25 February 2009

Wipo publication date 29 April 2010

Acceptance publication date 21 October 2010

International Classifications

C23C 16/54 (2006.01) Chemical deposition or plating by decomposition - Apparatus specially adapted for continuous coating

C23C 16/50 (2006.01) Chemical deposition or plating by decomposition - using electric discharges

C23C 16/515 (2006.01) Chemical deposition or plating by decomposition

Event Publications

29 April 2010 Application Open to Public Inspection

  Published as AU-B-2009292608

29 April 2010 PCT application entered the National Phase

21 October 2010 Application Accepted

  Published as AU-B-2009292608

17 February 2011 Standard Patent Sealed

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