Method for the treatment of substrates, substrate and treatment device for carrying out said method

Details for Australian Patent Application No. 2009291208 (hide)

Owner Gebr. Schmid GmbH & Co.

Inventors Habermann, Dirk

Agent Griffith Hack

Pub. Number AU-A-2009291208

PCT Pub. Number WO2010/028825

Priority 10 2008 048 540.3 15.09.08 DE

Filing date 10 September 2009

Wipo publication date 18 March 2010

International Classifications

H01L 21/00 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/311 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

24 March 2011 PCT application entered the National Phase

  PCT publication WO2010/028825 Priority application(s): WO2010/028825

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