Coated substrates and semiconductor devices including the substrates

Details for Australian Patent Application No. 2009289540 (hide)

Owner First Solar, Inc.

Inventors Buller, Benyamin

Agent Cullens

Pub. Number AU-A-2009289540

PCT Pub. Number WO2010/028268

Priority 12/553,354 03.09.09 US; 61/094,602 05.09.08 US

Filing date 4 September 2009

Wipo publication date 11 March 2010

International Classifications

C23C 14/34 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

H01L 21/00 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

24 March 2011 PCT application entered the National Phase

  PCT publication WO2010/028268 Priority application(s): WO2010/028268

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