Improved nanoimprint method

Details for Australian Patent Application No. 2009286690 (hide)

Owner AMO GMBH

Inventors Koo, Namil; Kim, Jung Wuk; Moormann, Christian

Agent Hodgkinson McInnes

Pub. Number AU-A-2009286690

PCT Pub. Number WO2010/023227

Priority 10 2008 041 623.1 27.08.08 DE

Filing date 26 August 2009

Wipo publication date 4 March 2010

International Classifications

G03F 7/00 (2006.01) Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

Event Publications

17 March 2011 PCT application entered the National Phase

  PCT publication WO2010/023227 Priority application(s): WO2010/023227

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