Process and system for fabrication of patterns on a surface

Details for Australian Patent Application No. 2009267415 (hide)

Owner THE PROVOST, FELLOWS AND SCHOLARS OF THE COLLEGE OF THE HOLY AND UNDIVIDED TRINITY OF QUEEN ELIZABETH NEAR DUBLIN

Inventors McKenzie, Warren; Cross, Graham L. W.; Pethica, John B.

Agent Pegasus IP

Pub. Number AU-A-2009267415

PCT Pub. Number WO2010/003600

Priority 61/079,895 11.07.08 US; 08104722.7 11.07.08 EP

Filing date 3 July 2009

Wipo publication date 14 January 2010

International Classifications

G03F 7/11 (2006.01) Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - having cover layers or intermediate layers, e.g. subbing layers

B81C 1/00 (2006.01) Manufacture or treatment of devices or systems in or on a substrate

G03F 7/00 (2006.01) Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

H01L 21/033 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

3 February 2011 PCT application entered the National Phase

  PCT publication WO2010/003600 Priority application(s): WO2010/003600

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