Owner Probst, V.

Inventors Probst, Volker

Agent Shelston IP

Pub. Number AU-A-2009259641

PCT Pub. Number WO2009/153059

Priority 08011247.7 20.06.08 EP

Filing date 19 June 2009

Wipo publication date 23 December 2009

F27B 7/00 (2006.01) Rotary-drum furnaces, i.e. horizontal or slightly inclined

C23C 16/455 (2006.01) Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

F27B 5/04 (2006.01) Muffle furnaces

F27B 5/14 (2006.01) Muffle furnaces

F27B 5/16 (2006.01) Muffle furnaces

F27D 7/04 (2006.01) Forming, maintaining, or circulating atmospheres in heating chambers

H01L 21/00 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 31/00 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation